Borofloat glass wafer is used in a wide range of applications like micro-optics, sensors, microlithography, semiconductor engineering, lighting, medical technology, etc and it has outstanding properties. It is manufactured using the latest technology and features a clear, colorless, high-quality mirror-like surface and excellent optical quality. It has a uniform thickness, low internal stresses, and is resistant to thermal shock.
WaferPro offers a wide variety of high-purity borofloat glass wafers for the semiconductor industry because they are chemically inert and have low levels of density variation across the surface.
WaferPro also offers borofloat glass wafers for the microelectronics industry from our exclusive plant. As a leading supplier of high-purity borofloat glass wafers, we are able to meet any customer need with our extensive product lines. We deliver our high-purity borofloat on time, every time, with consistent quality.
WaferPro Borofloat glass wafers are made with a carefully adjusted formula that creates the proper amount of strength, hardness and wear resistance. Borofloat has excellent thermo-oxidation and oxidation stability, so it is well suited for most applications.
| Size | Inch | 2" | 3" | 4" | 6" | 8" | 10" | 12” |
|---|---|---|---|---|---|---|---|---|
| Diameter | mm | 50.8 | 76.2 | 100 | 150 | 200 | 250 | 300 |
| Tolerance (±) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
| Thickness | µm | 100 and up | 100 and up | 100 and up | 300 and up | 400 and up | 500 and up | 500 and up |
| Primary reference flat | mm | 32.5 | 32.5 | 32.5 | 57.5 | Semi-notch | Semi-notch | Semi-notch |
| LTV (5mmx5mm) | µm | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 |
| TTV | µm | < 2 | < 2 | < 2 | < 3 | <3 | <5 | <5 |
| Bow | µm | ±20 | ±20 | ±20 | ±30 | ±40 | ±40 | ±40 |
| Warp | µm | ≤ 30 | ≤ 30 | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | ≤ 50 |
| PLTV(5mm*5mm)<0.4um | % | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
| Edge Rounding | mm | SEMI Std. | SEMI Std. | SEMI Std. | SEMI Std. | SEMI Std. | SEMI Std. | SEMI Std. |
| Surface Type | SSP/DSP | SSP/DSP | SSP/DSP | SSP/DSP | SSP/DSP | SSP/DSP | SSP/DSP | |
| Surface Roughness | nm | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
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