ITEM# C04022

100mm P/B <1-0-0> 1-10 ohm-cm, 200±10µm PRIME SILICON WAFER
DOUBLE SIDE POLISHED, TWO SEMI-STD FLATS
BOW <30µm, WARP <30µm, TTV <5µm
PARTICLE <10@>0.3µm, OTHER PARAMETERS PER SEMI STANDARD
IN FACTORY SEALED CASSETTE, 25 WAFERS PER CASSETTE