ITEM# C04021
100mm P/B <1-1-1> 1-5 ohm-cm, 525±25µm PRIME SILICON WAFER
SINGLE SIDE POLISHED, PRIMARY FLAT ONLY
BOW <40µm, WARP <40µm, TTV <10µm
PARTICLE <10@>0.3µm, OTHER PARAMETERS PER SEMI STANDARD
IN FACTORY SEALED CASSETTE, 25 WAFERS PER CASSETTE