ITEM# F03040
3″ INTRINSIC/UNDOPED <1-0-0> >10,000 ohm-cm, 381±10µm PRIME FZ WAFER
SINGLE SIDE POLISHED, PRIMARY FLAT ONLY
BOW/WARP<20µm, TTV<5µm, TIR<3µm, STIR<1.5µm,
PARTICLE <10@>0.3µm, OTHER PARAMETERS PER SEMI STANDARD
IN FACTORY SEALED CASSETTE, 25 WAFERS PER CASSETTE
