6″ (150mm) Fused Silica Wafer

$35.00$42.00 /pcs

*Free Shipping for All U.S. Orders via FedEx Ground


*Only in-stock options are available for selection. For custom wafers, request a quote here.

Select your specifications below:

Quantity Discount:

Quantity(pcs) 100 - 225 250 - 475 500 - 1000
Price $33.25$39.90 $31.50$37.80 $29.75$35.70
% Discount 5% 10% 15%
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WaferPro 6″ (150mm) Fused Silica Wafer


WaferPro, a leading provider of semiconductor materials, is proud to offer high-quality 6″ (150mm) fused silica wafers. These wafers are manufactured from high-purity fused silica, ensuring minimal metal contamination and exceptional UV light transmission. They are well-suited for UV optical and semiconductor applications, featuring extremely low trace metal and OH content, as well as a low coefficient of thermal expansion (CTE).

Key Specifications:

Specification Value
Material High Purity Fused Silica
Diameter 150.0 ± 0.2 mm
Thickness Tolerance ± 25 μm
Bow ≤25 µm
Warp ≤25 µm
Surface Roughness (Ra) ≤0.5 nm
TTV ≤5 μm
S/D 40/20
Packaging Cleanroom Packed

Key Features:

  • High Purity: The wafers are made from high-purity fused silica, ensuring low metal contamination and high UV light transmission.
  • Double Side Polished: They are double side polished, providing a smooth and uniform surface.
  • Low CTE: The wafers have a low coefficient of thermal expansion, making them suitable for high thermal processing.
  • Cleanroom Packed: They are packaged in a cleanroom environment to protect them from particulate contamination.
  • Versatile Applications: Suitable for a wide range of applications, including UV optical and semiconductor applications.
  • Trusted by Industry Leaders: Used by leading research labs and high volume production facilities worldwide.
  • Quality Control and Inspection: Every wafer undergoes comprehensive quality inspection and testing.

Major Applications:

Our 6″ 150mm fused silica wafers are suitable for various applications, including:

  • UV optical applications
  • Semiconductor manufacturing
  • Sensor manufacturing
  • Research and development
  • High thermal processing applications

Our stringent quality control ensures the high purity and thickness uniformity needed to serve as substrates across high-tech industries. We welcome discussions about specific applications to recommend configurations that best meet your needs.

Quantity Discounts:

We offer quantity discounts on orders of 100 wafers or more. Customized pricing is available for high volume wafer needs (1,000pcs or more). Contact us for prompt quotes tailored to your requirements.

Contact Us:

For any inquiries about our 6″ (150mm) fused silica wafers, including specifications, pricing, or lead times, please reach out to us. We are here to assist you in enabling your next technology breakthrough! For more information, please visit WaferPro’s website.


Packaging for WaferPro 150mm Fused Silica Wafer:

  • All wafers are packed in wafer cassettes made from ultra-clean PP material
  • Each cassette holds 25 wafers
  • Each cassette is vacuum sealed double-bagged in poly & foil antistatic bags
  • All cassettes are designed to interface with automated equipment
  • SEMI compliant

Shipping & Return Policy:

We offer free US standard shipping via FedEx within the continental United States. Customers can expect to receive their order within 2-7 business days after it has shipped. For orders being shipped to Alaska, Hawaii, Puerto Rico, or internationally, additional shipping costs and extended delivery times may apply. Contact us for international shipping quotes or get an estimate on the checkout page. All orders are carefully inspected, packaged, and shipped from our California warehouse.

A tracking number will be emailed to you once your order has shipped.

We want you to be fully satisfied with every purchase.
If, for any reason, you would like to return an unopened and unused product within 30 days of delivery, please contact us to request a return authorization. The product must be in the original packaging and in the same condition as when you received it. Approved returns must be shipped back in resalable condition within 45 days of our delivery date. Upon receipt and inspection of the returned product, you will receive a full refund to your original payment method. Shipping fees are nonrefundable. Exchanges for alternative wafer sizes/specs can be accommodated, subject to inventory availability. Please send us details about the exchange you would like to make prior to shipping the original product back. If you receive damaged products, defective products, or incorrect items, please notify us within 48 hours of delivery with details and photographs documenting the issues. We will provide prompt assistance. Please contact us with any questions about our shipping guidelines or returns process. Our customer service team is available Monday-Friday, 9 AM – 6 PM Pacific. Our email address is sales@waferpro.com.