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FUSED SILICA WAFERS

“Fused Silica” or “Fused Quartz” which is the amorphous phase of quartz (SiO2). When contrasted to borosilicate glass, fused silica has no additives; hence it exists in its pure form, SiO2. Fused silica has a higher transmission in the infrared and ultraviolet spectrum when compared to normal glass. Fused silica is produced by melting and re-solidifying ultrapure SiO2. Synthetic fused silica on the other hand is made from silicon-rich chemical precursors such as SiCl4 which are gasified and then oxidized in a H2 + O2 atmosphere. The SiO2 dust formed in this case is fused to silica on a substrate. The fused silica blocks are cut into wafers after which the wafers are finally polished.

WaferPro offers top quality Fused Silica glass wafers manufactured from the following substrate materials.

Ultraviolet Grade Fused Silica – JGS1
Ultraviolet Grade Fused Silica wafers encompass a high transparency in the ultraviolet spectral range. The transmission in the VIS and UV is approx. 90 % hence only reflection losses and drops between 220 and 150 nm down to 0 %. In the infrared range, the comparable high OH-concentration of normally 1000 ppm which causes absorption bands for wavelengths > 1.2 μm.

Optical Grade Fused Quartz – JGS2
The transmission range of significantly cheaper JGS2 wafers is shifted towards longer wavelengths when compared with JGS1 wafers. In this case, UV-absorption starts below approx. 270 nm wavelengths, while in the VIS and IR the transmission is approximately 90 % up to approximately 2 μm wavelength as a result of lower OH-concentration (typ. < 300 ppm).

Full Spectrum Fused Silica – JGS3
These are wafers which are comparatively more expensive than the others. These wafers encompass very low OH-content (typ. < 10 ppm) showing a high transparency of > 80 % over a broad spectral range of approximately 200 nm – 3 μm, and approximately 90 % in the wavelength range 250 – 2.5 μm.

Fused Silica wafer

Specifications

SizeInch2"3"4"6"8"10"12”
Diametermm50.876.2100150200250300
Tolerance (±)mm0.20.20.20.20.20.20.2
Thicknessµm100 and up100 and up100 and up300 and up400 and up500 and up500 and up
Primary reference flatmm32.532.532.557.5Semi-notchSemi-notchSemi-notch
LTV (5mmx5mm)µm< 0.5< 0.5< 0.5< 0.5< 0.5< 0.5< 0.5
TTVµm< 2< 2< 2< 3<3<5<5
Bowµm±20±20±20±30±40±40±40
Warpµm≤ 30≤ 30≤ 30≤ 40≤ 50≤ 50≤ 50
PLTV(5mm*5mm)<0.4um%≥95%≥95%≥95%≥95%≥95%≥95%≥95%
Edge RoundingmmSEMI Std.SEMI Std.SEMI Std.SEMI Std.SEMI Std.SEMI Std.SEMI Std.
Surface TypeSSP/DSPSSP/DSPSSP/DSPSSP/DSPSSP/DSPSSP/DSPSSP/DSP
Surface Roughnessnm≤1≤1≤1≤1≤1≤1≤1

However, if you do not see a material you need, please contact our Sales Engineers who will discuss with you any additional options which are available.